Computation Of Statistics For Statistical Data Decimation

ABSTRACT

Systems and methods for statistical data decimation are described. The method includes receiving a variable from a radio frequency (RF) system, propagating the variable through a model of the RF system, and counting an output of the model for the variable to generate a count. The method further includes determining whether the count meets a count threshold, generating a statistical value of the variable at the output of the model upon determining that the count meets the count threshold, and sending the statistical value to the RF system to adjust the variable.

CLAIM OF PRIORITY

This application is a continuation application and claims the benefit ofand priority under 35 U.S.C. §120 to co-pending U.S. application Ser.No. 14/086,883, filed on Nov. 21, 2013, and titled “Computation ofStatistics for Statistical Data Decimation”, which claims the benefit ofand priority under 35 U.S.C. §119(e) to U.S. Provisional PatentApplication No. 61/737,623, filed on Dec. 14, 2012, and titled “Methodsof Computation of Statistics For Statistical Data Decimation”, all ofwhich are hereby incorporated by reference in their entirety.

FIELD

The present embodiments relate to performing statistical datadetermination and use of a statistical value in a plasma system.

BACKGROUND

In a plasma system, a radio frequency (RF) signal is generated by agenerator. The signal is transferred to a plasma reactor to generateplasma within the plasma reactor. The plasma formed in the plasmareactor is used for a variety of applications, e.g., clean a wafer,deposit materials on the wafer, etch the wafer, etc.

It is desirable to control properties of the plasma to control theapplications. For example, it is desirable to control plasma uniformityto achieve an etch rate. As another example, it is desirable to controlpower of the plasma to achieve a deposition rate.

To control a property, the property is measured using a sensor in theplasma system.

It is in this context that embodiments described in the presentdisclosure arise.

SUMMARY

Embodiments of the disclosure provide apparatus, methods and computerprograms for generating a statistical value to reduce an amount of dataassociated with a model within a plasma system. It should be appreciatedthat the present embodiments can be implemented in numerous ways, e.g.,a process, an apparatus, a system, a device, or a method on acomputer-readable medium. Several embodiments are described below.

In some embodiments, a statistical value is used to control a plasmachamber or to generate an RF signal. For example, instead of analyzingall values of a variable at an output of a computer-generated model tocontrol a plasma chamber, a statistical value is generated from thevalues and it is determined whether the statistical value is within apre-determined range. Upon determining that the statistical value iswithin the pre-determined range, the plasma chamber is not controlled,e.g., an RF signal being supplied to the plasma chamber is not modified,etc. On the other hand, upon determining that the statistical value isoutside the pre-determined range, the plasma chamber is controlled usingthe statistical value, e.g., an RF signal supplied to the plasma chamberis generated based on the statistical value, etc.

In various embodiments, a method includes receiving a variable from aradio frequency (RF) system, propagating the variable through a model ofthe RF system, and counting an output of the model for the variable togenerate a count. The method further includes determining whether thecount meets a count threshold, generating a statistical value of thevariable at the output of the model upon determining that the countmeets the count threshold, and sending the statistical value to the RFsystem to adjust the variable.

In various embodiments, a method includes receiving data associated witha variable from a radio frequency (RF) generator. The RF generator isconfigured for generating an RF signal to be supplied via an impedancematching circuit to a plasma chamber. The variable is associated with anRF system, which includes the RF generator, impedance matching circuit,and the plasma chamber. The method further includes generating values atan output of a computer-generated model based on the received data,counting an amount of the values output from the computer-generatedmodel, determining whether the amount exceeds a count threshold,generating a statistical value from the values output from thecomputer-generated model in response to determining that the amountexceeds the count threshold, and sending the statistical value to the RFgenerator to adjust the RF signal produced by the RF generator.

In some embodiments, a method includes receiving data associated with avariable from a radio frequency (RF) generator. The RF generator is usedfor generating an RF signal to be supplied via an impedance matchingcircuit to a plasma chamber. The variable is associated with an RFsystem, which includes the RF generator, impedance matching circuit, andthe plasma chamber. The method includes generating values at an outputof a computer-generated model based on the received data, counting anamount of the values output from the computer-generated model,determining whether the amount exceeds a count threshold, generating astatistical value from the values output from the computer-generatedmodel in response to determining that the amount exceeds the countthreshold, determining whether the statistical value is outside apre-determined range, adjusting the statistical value to be within thepre-determined range in response to determining that the statisticalvalue is outside the pre-determined range, and sending the adjustedstatistical value to the RF generator to control the RF generator toadjust the RF signal produced by the RF generator.

In a number of embodiments, a method includes receiving data associatedwith a variable from a radio frequency (RF) generator. The RF generatoris used for generating an RF signal to be supplied via an impedancematching circuit to a plasma chamber. The variable is associated with anRF system, which includes the RF generator, impedance matching circuit,and the plasma chamber. The method further includes generating values atan output of a computer-generated model based on the received data,counting an amount of the values output from the computer-generatedmodel, determining whether the amount exceeds a count threshold, andgenerating a statistical value from the values output from thecomputer-generated model in response to determining that the amountexceeds the count threshold. The method includes determining whether thestatistical value is outside a pre-determined extent, generating anindication of a fault in response to determining that the statisticalvalue is outside the pre-determined extent, and sending the faultindication to the RF generator.

Some advantages of one or more embodiments described in the presentdisclosure include use of a statistical value instead of all values of avariable at an output of a computer-generated model to control a plasmachamber. For example, instead of determining whether the values arewithin a pre-determined range, it is determined whether a statisticalvalue is within the pre-determined range. Upon determining that thestatistical value is within the pre-determined range, no change is madeto further control the plasma chamber. On the other hand, upondetermining that the statistical value is outside the pre-determinedrange, a change is made to the statistical value to control the plasmachamber to achieve the changed statistical value.

The use of the statistical value instead of all the values at an outputof a computer-generated model saves processing costs associated withprocessing the values. For example, instead of using a number ofservers, e.g., a server farm, etc., to process the values to generate astatistical value and to control the plasma chamber based on the values,a number of processors, e.g. one, two, etc. is sufficient to generatethe statistical value and to control the plasma chamber based on thestatistical value.

Other advantages of one or more embodiments described in the presentdisclosure include decimating data received after generating astatistical value of a variable. The decimation of the data createsempty locations within a storage device of a host controller. The emptylocations are used to receive more data regarding a variable associatedwith a plasma system.

Other aspects will become apparent from the following detaileddescription, taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments may best be understood by reference to the followingdescription taken in conjunction with the accompanying drawings.

FIG. 1 is a block diagram of a plasma system for generating astatistical value of a variable, in accordance with an embodimentdescribed in the present disclosure.

FIG. 2 is a diagram of another plasma system for generating astatistical value of a variable, in accordance with an embodimentdescribed in the present disclosure.

FIG. 3 is a diagram of a host system of the plasma system of FIG. 1 orFIG. 2, in accordance with an embodiment described in the presentdisclosure.

FIG. 4 is a diagram of another host system of the plasma system of FIG.1 or FIG. 2, in accordance with an embodiment described in the presentdisclosure.

FIG. 5 is a diagram of a storage device for illustrating use of pointersto access a memory location, in accordance with an embodiment describedin the present disclosure.

FIG. 6 is a diagram of an insertion sort operation, in accordance withan embodiment described in the present disclosure.

FIG. 7 is a diagram of memory arrays to illustrate a merge sortoperation, in accordance with an embodiment described in the presentdisclosure.

FIG. 8 is a diagram of a storage device to illustrate a comparisonoperation within a merge sort operation, in accordance with anembodiment described in the present disclosure.

FIG. 9 is a diagram of a statistical determination (SD) module of theplasma system of FIG. 1 or FIG. 2, in accordance with an embodimentdescribed in the present disclosure.

FIG. 10 is a diagram of an SD module of the plasma system of FIG. 1 orFIG. 2, in accordance with an embodiment described in the presentdisclosure.

FIG. 11 is a diagram of an embodiment of a time slice sampling method tocompensate for bias and/or to detect a fault in a plasma system, inaccordance with one embodiment described in the present disclosure.

FIG. 12 is a block diagram of an SD module that is used to generate amoving variance, in accordance with an embodiment described in thepresent disclosure.

FIG. 13 is a flowchart of a method for generating a statistical value,in accordance with an embodiment described in the present disclosure.

DETAILED DESCRIPTION

The following embodiments describe systems and methods for performingstatistical data decimation. It will be apparent that the presentembodiments may be practiced without some or all of these specificdetails. In other instances, well known process operations have not beendescribed in detail in order not to unnecessarily obscure the presentembodiments.

FIG. 1 is a block diagram of an embodiment of a plasma system 100 forgenerating a statistical value of a variable. The plasma system 100includes a host system 140, an x megahertz (MHz) radio frequency (RF)generator, a y MHz RF generator, and a z MHz RF generator. Each RFgenerator includes a controller. For example, the x MHz RF generatorincludes an x controller, the y MHz RF generator includes a ycontroller, and the z MHz RF generator includes a z controller. Examplesof x MHz, y MHz, or z MHz include 2 MHz, 27 MHz, and 60 MHz. In someembodiments, x MHz is 2 MHz, y MHz is 27 MHz, and z MHz is 60 MHz.Moreover, the host system 140 includes a host controller 150.

In some embodiments, a controller includes a processor and a storagedevice. In several embodiments, a processor is a central processing unit(CPU), or a microprocessor, or an application specific integratedcircuit (ASIC), or a programmable logic device (PLD), etc. Examples of astorage device include a read-only memory (ROM), a random access memory(RAM), or a combination thereof. In various embodiments, a storagedevice is a flash memory, or a redundant array of storage disks (RAID),or a hard disk, etc.

The x controller is coupled to the host system 140 via a cable 144,which includes a serial connection, or a parallel connection, or aparallel serial parallel interface (PSPI). Similarly, the y MHz RFgenerator is coupled to the host system via a cable and the z MHz RFgenerator is coupled to the host system 140 via a cable. Each cablecoupling an RF generator to the host system 140 includes a serialconnection, or a parallel connection, or a parallel serial parallelinterface (PSPI).

The plasma system 100 further includes an impedance matching circuit 106and a plasma chamber 111. The impedance matching circuit 106 isconnected to the plasma chamber 111 via an RF transmission line 132. Insome embodiments, a portion of the RF transmission line 132 includes anRF cable that is surrounded by an insulator that is surrounded by an RFtunnel and another portion of the RF transmission line 132 leading to achuck 152 is surrounded by an RF cylinder.

The impedance matching circuit matches an impedance of a load connectedto the impedance matching circuit with that of a source connected to theimpedance matching circuit. The source provides RF energy to the load,which consumes the RF energy. Examples of the source include one or moreof the x, y, and z RF generators, and one or more of the RF cablescoupling the RF generators to the impedance matching circuit 106. Insome embodiments, the source includes other devices (not shown), e.g., afilter used to filter an RF signal supplied via an RF cable, etc., ofthe plasma system 100 that are coupled between the impedance matchingcircuit 106 and one or more of the x, y, and z MHz RF generators.Examples of the load include the plasma chamber 111 and the RFtransmission line 132. Other examples of the load include other devices(not shown), e.g., a filter to filter an RF signal supplied via the RFtransmission line 132, etc., of the plasma system 100 that are coupledbetween the impedance matching circuit 106 and the plasma chamber 111.

The plasma chamber 111 includes the chuck 152, e.g., an electrostaticchuck (ESC), a magnetic chuck, etc., that is connected to the RFtransmission line 132. The plasma chamber 111 further includes an upperelectrode 154 that faces the chuck 152. For example, a lower surface 156of the upper electrode 154 is located across and faces an upper surface158 of the chuck 152. In various embodiments, the upper electrode 154 isgrounded. The chuck 152 includes a lower electrode that is made of ametal, e.g., anodized aluminum, alloy of aluminum, etc. Also, the upperelectrode 154 is made of a metal, e.g., aluminum, alloy of aluminum,etc.

A work piece 160, e.g., a semiconductor wafer, a semiconductor wafer onwhich an integrated circuit is developed, etc., is placed on the uppersurface 158 for processing of the work piece 160. Examples of processingthe work piece 160 include cleaning the work piece 160, or etching thework piece 160, or depositing films, e.g., oxide films, etc., on thework piece 160, or a combination thereof, etc. The integrated circuitdeveloped on the work piece 160 is used in a variety of computingdevices, such as, for example, cell phones, tablets, smart phones,computers, laptops, networking equipment, etc.

In some embodiments, the plasma chamber 111 includes other components(not shown), e.g., an upper dielectric ring surrounding the upperelectrode 154, an upper electrode extension surrounding the upperdielectric ring, a lower dielectric ring surrounding the chuck 152, alower electrode extension surrounding the chuck 152, an upper plasmaexclusion zone (PEZ) ring, a lower PEZ ring, etc.

In various embodiments, the upper electrode 154 includes one or moreholes that are coupled to a central gas feed, e.g., a gas supply line(not shown), etc. The central gas feed receives one or more processgases from a gas source (not shown). Examples of a process gases includean oxygen-containing gas, such as O₂. Other examples of a process gasinclude a fluorine-containing gas, e.g., tetrafluoromethane (CF₄),sulfur hexafluoride (SF₆), hexafluoroethane (C₂F₆), etc. The upperelectrode 154 is grounded. The lower electrode 152 is coupled to the xMHz RF generator via the impedance matching circuit 106, to the y MHz RFgenerator via the impedance matching circuit 106, and to the z MHz RFgenerator via the impedance matching circuit 106.

When the process gas is supplied between the upper electrode 154 and thechuck 152 and when one or more of the x, y, and z MHz RF generatorssupply one or more RF signal power via the impedance matching circuit106 to the chuck 152, the process gas is ignited to generate plasmawithin the plasma chamber 111. For example, the x MHz generator suppliesan RF signal 104 via the RF cable 130 to the impedance matching circuit106. The impedance matching circuit 106 modifies one or more RF signalsreceived from corresponding one or more of the x, y, and z RF generatorsto generate a modified RF signal and provides the modified RF signal viathe RF transmission line 132 to ignite the process gas to generateplasma within a gap between the chuck 152 and the upper electrode 154.As another example, the y MHz RF generator supplies an RF signal via anRF cable that couples the y MHz RF generator to the impedance matchingcircuit 106 that modifies the RF signal. In this example, the modifiedRF signal is further sent via the impedance matching circuit 106 and theRF transmission line 132 to the chuck 152 to generate plasma.

During operation of the plasma system 100 to generate plasma, each RFcontroller receives an amount of data of a variable from a sensor (notshown) that is coupled to a point within the plasma system 100. Forexample, the x controller receives values of a variable from a voltageand current probe that is connected to the RF cable 130. As anotherexample, the y controller receives values of a variable from a voltageand current probe that is connected to the RF cable that connects the yMHz RF generator to the impedance matching circuit 106. As anotherexample, the y controller receives values of a variable from a voltageprobe that is connected to the RF transmission line 132. As yet anotherexample, the z controller receives values of an optical sensor that isoptically coupled to the plasma via a window within the plasma chamber.

Examples of a variable include power of an RF signal at a point of theplasma system 100, or power of plasma, or frequency of the RF signal, orreal portion of load impedance, or imaginary portion of the loadimpedance, or a voltage magnitude at the point, or a current magnitudeat the point, or a phase between a complex voltage and a complex currentat the point, or a wafer bias at the point, or ion energy at the point,or plasma potential at the point, or a complex current at the point, ora complex voltage at the point, or load impedance at the point, or acombination thereof.

Examples of a load impedance include an impedance of one or morecomponents of the plasma system 100. For example, a load impedance is animpedance at a point within the plasma system 100. As another example, aload impedance is an impedance of one or more of the RF cable 130, theRF cable coupling the y MHz RF generator to the impedance matchingcircuit 106, the RF cable coupling the z MHz RF generator to theimpedance matching circuit 106, the impedance matching circuit 106, theRF transmission line 132, and the plasma chamber 111.

In some embodiments, a point within the plasma system 100 includes apoint at an output of the x MHz RF generator, or a point at an output ofthe y MHz RF generator, or a point at an output of the z MHz RFgenerator, or a point on the RF cable 130, or a point on the RF cablecoupling the y MHz RF generator to the impedance matching circuit 106,or a point on the RF cable coupling the z MHz RF generator to theimpedance matching circuit 106, or a point at an input of the impedancematching circuit 106, or a point at an output of the impedance matchingcircuit 106, or a point on the RF transmission line 132, or a point atthe chuck 152.

In various embodiments, an output of the x MHz RF generator is coupledvia the RF cable 130 to an input of the impedance matching circuit 106,an output of the y MHz RF generator is coupled via an RF cable to aninput of the impedance matching circuit 106, and an output of the z MHzRF generator is coupled via an RF cable to an input the impedancematching circuit 106. In several embodiments, an output of the impedancematching circuit 106 is coupled via the RF transmission line 132 to thechuck 152.

The host controller 150 includes one or more components, e.g., avariable requestor 170, a variable receiver 110, a model 113, a modelvalue generator 115, a data amount calculator 112, a limit crossoverdetermination module 114, a statistical data decimation (SDD) module172, a switch module 180, an RF control block 197, and a sender 174. TheSDD Module 172 includes a statistical determination (SD) module 116 anda data deletion module 120.

In some embodiments, one or more components of a host controller, asdescribed herein, are implemented as a computer program on anon-transitory computer-readable medium, such as, for example, a storagedevice, etc. In various embodiments, one or more components of a hostcontroller are implemented as hardware, e.g., an application specificintegrated circuit, etc. For example, the switching module 180 is atransistor or a group of transistors. In several embodiments, one ormore components of a host controller, as described herein, areimplemented as a combination of hardware and a computer program.

The variable requester 170 requests via a communication channel of thecable 144 data of a variable from the x controller. In some embodiments,the variable requester 170 sends an address, e.g., a port address, etc.,of the variable receiver 110 to the x controller to allow the xcontroller to sends data of a variable to the variable receiver 110.

In a number of embodiments, the host controller 150 excludes thevariable requester 170 and the x controller periodically sends data of avariable to the variable receiver 110. Upon receiving the request, the xcontroller sends data of a variable via a communication channel 102 ofthe cable 144 to the variable receiver 110.

In some embodiments, the variable requester 170 and the variablereceiver 110 is implemented as one component.

Similarly, in several embodiments, the variable receiver 110 receivesdata of a variable from a combination of the x controller, the ycontroller, and the z controller.

The variable receiver 110 receives data of a variable from one or moreof the x, y, and z MHz RF generators and sends the data to a model 113.Examples of the model 113 include an RF cable model, or an impedancematching model, or an RF transmission model, or a chuck model, or acombination of the RF cable model and the impedance matching model, or acombination of the RF cable model and the impedance matching model andthe RF transmission model, or a combination of the RF cable model andthe impedance matching model and the RF transmission model and the chuckmodel, etc.

A model of a component of a plasma system is a computer-generated modelof the component. For example, the RF transmission model is acomputer-generated model of the RF transmission line 132 (FIG. 1). Asanother example, the RF transmission model includes an electricalcircuit that includes electrical components, e.g., capacitors, orinductors, etc., of the RF transmission line 132. To illustrate, whenthe RF transmission line 132 includes an inductor having an inductanceof L Henry and a capacitor having a capacitance of C Farad, the RFtransmission model includes an inductor having an inductance of L Henryand a capacitor having a capacitance of C Farad. Moreover, in the RFtransmission model, components within the electrical circuit areconnected in the same manner, e.g., serial, parallel, etc., as that inwhich electrical components of the electrical circuit of the RFtransmission line 132 are connected. For example, when an inductor isconnected in parallel with a capacitor within the RF transmission line132, the RF transmission model includes an inductor connector inparallel with an inductor.

Similarly, the impedance matching model is created based on theimpedance matching circuit 106 in a similar manner as that of generatingthe RF transmission model from the RF transmission line 132. Moreover,the RF cable model is created based on an RF cable, e.g., the RF cable130 (FIG. 2), etc., in a similar manner as that of generating the RFtransmission model from the RF transmission line 132. Also, the chuckmodel is generated based on the chuck 152 in a similar manner as that ofgenerating the RF transmission model from the RF transmission line 132.

In some embodiments, the model 113 is generated by a processor of a hostcontroller.

Examples of a generating a model are provided in application Ser. No.13/756,390, filed on Jan. 31, 2013, and titled “Using Modeling toDetermine Wafer Bias Associated with a Plasma System”, which isincorporated by reference herein in its entirety.

The model value generator 115 generates values of a variable at anoutput of the model 113 based on the values that are received by thevariable receiver 110 and characteristics, e.g., capacitance, orinductance, or impedance, or complex current, or complex current, etc.,of the model 113. For example, the model value generator 115 propagatesan impedance value that is received from the x controller throughcomponents of an RF cable model and an impedance matching model togenerate an impedance value at an output of the impedance matchingmodel. In some embodiments, the impedance value that is received fromthe x controller is an impedance value at an output of the x MHz RFgenerator. As another example, the model value generator 115 propagatesa complex current and voltage value that is received from the ycontroller via components of an RF cable model, an impedance matchingmodel, and an RF transmission model to generate a complex voltage andcurrent value at an output of the RF transmission model. As yet anotherexample, the model value generator 115 propagates a power value that isreceived from the y controller via components of an RF cable model, animpedance matching model, an RF transmission model, and a chuck model togenerate a complex voltage and current at an output of the chuck model.

In some embodiments, a value of a variable is propagated when adirectional sum is calculated of the value and characteristics, e.g.,impedance value, power consumption value, voltage value, current value,etc., of a component of a model. An example of a directional sum isprovided in application Ser. No. 13/756,390.

In various embodiments, the model value generator 115 generates a valueof one variable from values of one or more variables. For example, themodel value generator 115 generates a value of a wafer bias at an outputof the model 113 from a voltage magnitude of a complex voltage andcurrent at the output, a current magnitude of the complex voltage andcurrent at the output, and a power magnitude of the complex voltage andcurrent at the output. Other examples of generating the wafer bias areprovided in application Ser. No. 13/756,390. As another example, themodel value generator 115 generates a value of ion energy at an outputof the model 113 from a wafer bias at the output and a zero-to-peakvoltage at the output. Other examples of generating an ion energy isprovided in Application No. 61/799,969, filed on Mar. 15, 2013, andtitled, “Using Modeling to Determine Ion Energy Associated with a PlasmaSystem”, which is incorporated by reference herein in its entirety.

In some embodiments, for each value received by the variable receiver110 from one or more of the x, y, and z MHz RF generators, a value at anoutput of the model 113 is calculated.

Data of a variable at an output of the model 113 is sent from the modelvalue generator 115 to the data amount calculator 112. The data amountcalculator 112 counts a number of values of a variable received from themodel value generator 115, and sends the count to the limit crossoverdetermination module 114.

In some embodiments, the data amount calculator 112 calculates a numberof values of a variable that does not exceed a maximum storage capacityof the variable receiver 110.

The limit crossover determination module 114 determines whether thenumber of values received from the data amount calculator 112 is greaterthan a threshold, which is pre-stored in the limit crossoverdetermination module 114. Examples of the threshold include 1000 values,or 10,000 values, or 100,000 values, etc. Other examples of thethreshold include 500-1000 values, or 1000-10,000 values, or10,000-100,000 values, or 100,000-10,00,000 values, or10,00,000-10,000,000 values.

Upon determining that the number of values is greater than a threshold,a signal is sent from the limit crossover determination module 114 tothe SD module 116 to initiate generation of a statistical value from thevalues. On the other hand, upon determining that the number of valuesdoes not exceed a threshold, a signal is not sent from the limitcrossover determination module 114 to the SD module 116 and the SDmodule 116 does not start generation of a statistical value from thevalues.

In some embodiments, a threshold is generated based on a storagecapacity of a storage device of the host controller 150. For example,when the SD module 116 includes two buffers, each storing n values of avariable, a threshold is n values. When a first one of the two buffersis full, the SD module 116 copies data from the first buffer to a secondone of the two buffers and initiates calculation of a statistical valuefrom the data. The SD module 116 calculates a statistical value based onvalues within the first buffer. After the copying, in variousembodiments, data within the first buffer is overwritten with datagenerated by the model value generator 115.

In several embodiments, instead of the data amount calculator 112, aratio calculator is located within the host controller 150. The ratiocalculator is implemented as a computer program, or a hardware, or acombination thereof. The ratio calculator calculates a ratio of a numberof values that are received from the model value generator 115 within atime window to a number of values that are processed by a processor ofthe host controller 150 within the time window. In these embodiments,the limit crossover determination module 114 determines whether thecalculated ratio is greater than a limit, which is pre-stored within astorage device of the limit crossover determination module 114. Upondetermining that the calculated ratio is less than the limit, astatistical value is not generated from the values generated by themodel value generator 115. On the other hand, upon determining that thecalculated ratio is greater than or equal to the limit, a statisticalvalue is generated from the values generated by the model valuegenerator 115.

In some embodiments, a processing speed, which is equal to a number ofvalues processed within a time window, of a processor of the hostcontroller 150 is determined based on several factors, e.g., time takento access and calculate a statistical value from values received fromthe model value generator 115, or time taken to achieve a pressure inthe plasma chamber 111 after a signal to generate the pressure is sentby the processor, or time taken to sense and receive values of pressurewithin the plasma chamber 111, or time taken to achieve a temperature inthe plasma chamber 111 after a signal to generate the temperature issent by the processor, or time taken to sense and receive values oftemperature within the plasma chamber 111, or time taken to generate agap between the upper electrode 154 and the chuck 152 in the plasmachamber 111 after a signal to generate the gap is sent by the processor,or time taken to sense and receive values of a gap within the plasmachamber 111, or a combination thereof. For example, a processor of thehost controller 150 waits to process a pressure value until the pressurevalue is sensed by a pressure sensor (not shown) and received by theprocessor. This wait reduces processing speed of the processor. Asanother example, a processor of the host controller 150 waits to send asignal to change a gap between the upper electrode 154 and the chuck 152until a pressure and temperature is achieved within the plasma chamber111 after a signal to achieve the pressure and temperature is sent bythe processor. This wait reduces processing speed of the processor.

The SD module 116 determines a statistical value from data of a variablein response to receiving a signal from the limit crossover determinationmodule 114 that an amount of data of a variable received from the modelvalue generator 115 by the data amount calculator 112 exceeds athreshold. For example, the SD module 116 applies a statisticaloperation, such as, for example, an insertion sort operation, or a mergesort operation, or a moving interquartile range (IQR) calculationoperation, or an interquartile range calculation operation, or a maximumvalue calculation operation, or a minimum value calculation operation,or a mean value calculation operation, or a median value calculationmethod, or a variance value calculation method, or a standard deviationvalue calculation method, or a moving mean value calculation method, ora moving median value calculation method, or a moving variance valuecalculation method, or a moving standard deviation value calculationmethod, or a mode, or a moving mode, or a combination thereof, etc., togenerate a statistical value from values of a variable.

After generation of a statistical value, the SD module 116 closes theswitch module 180 to couple the variable receiver 110 with the datadeletion module 120. When the switch module 180 is closed, the datadeletion module 120 accesses data stored within a storage device of thedata receiver 110 and deletes, e.g., erases, resets, etc., data storedwithin the storage device to allow the variable receiver 110 to receiveand store additional data of a variable from one or more of the x, y,and z controllers. In this manner, a cost associated with implementing alarge number of variable receivers for storing a large amount of data isreduced. By deleting data of a variable stored within the variablereceiver 110, the variable receiver 110 is used multiple times forstorage of data of a variable.

In some embodiments, a statistical value is provided by the SD module116 to the RF control block 197. The RF control block 197 determines astatistical value of a variable from a statistical value of the variableor of another variable received from the SD module 116. For example, theRF control block 197 determines a statistical value power and/or astatistical value of frequency from a statistical value of a variablereceived from the SD module 116. As another example, the RF controlblock 197 determines a statistical value of frequency to be the same asthat received from the SD module 116. As another example, the RF controlblock 197 receives a statistical value of a wafer bias at the output ofthe model 113, and determines a voltage magnitude of a complex voltageand current at the output, a current magnitude of the complex voltageand current at the output, and a power magnitude of the complex voltageand current at the output. In this example, the voltage magnitude of acomplex voltage and current at the output, the current magnitude of thecomplex voltage and current at the output, and the power magnitude ofthe complex voltage and current at the output satisfy the value of thewafer bias at the output. As another example, the RF control block 197receives a statistical value of ion energy at an output of the model 113and determines a wafer bias value at the output and a zero-to-peakvoltage value at the output. In this example, the wafer bias value andthe zero-to-peak voltage satisfy the value of the ion energy. The RFcontrol block 197 sends a statistical value of a variable determined bythe RF control block 197 to the sender 174.

In various embodiments, the SD module 116 sends a statistical value of avariable to the sender 174 in addition to or without sending thestatistical value to the RF control block 197.

The sender 174 sends a statistical value of a variable received from theRF control block 197 and/or from the SD module 116 via correspondingcommunication channels to one or more of the x, y, and z controllers.For example, the sender 174 sends a statistical value of a variable viaa communication channel 184 to the x controller, sends a statisticalvalue of a variable via a communication channel to the y controller, andsends a statistical value of a variable via a communication channel tothe z controller. As another example, the sender 174 sends via thecommunication channel 184 a statistical value of a variable that isgenerated from data of the variable received from the x controller tothe x controller. As yet another example, the sender 174 sends via acommunication channel coupled to the y controller a statistical value ofa variable that is generated from data of the variable received from they controller to the y controller.

A controller of an RF generator receives a statistical value of avariable from the sender 174 and provides the statistical value to an RFsupply, e.g., an RF supply 186, etc., of the RF generator. The RF supplyincludes a driver, e.g., a transistors, a group of transistors, etc.,that generates an RF signal, e.g., an RF signal 124, etc., having astatistical value of a variable received from the sender 174. The RFsignal is amplified by an RF amplifier connected to the driver and issent via an RF cable that is coupled to the RF amplifier to theimpedance matching circuit 106.

The impedance matching circuit 106 matches an impedance of a load withthat of a source to modify an RF signal received via an RF cable, e.g.,the RF cable 130, etc., from an RF generator to generate an RF signaland sends the modified RF signal via the RF transmission line 132 to thechuck 152. When process gas is supplied within the plasma chamber 111and the modified RF signal is received by the chuck 152, plasma isgenerated within the plasma chamber 111. In some embodiments, whenplasma is generated before the modified RF signal is received,properties, e.g., impedance, power, frequency, etc., of the plasma aremodified upon receiving of the modified RF signal from the impedancematching circuit 106.

In some embodiments, the SD module 116 determines a statistical valuefrom data of a variable received from one or more of the x controller,the y controller, and the z controller.

In a number of embodiments, a number of RF generators other than thatshown in FIG. 1 are used. For example, the plasma system 100 includestwo RF generators or four RF generators.

It should further be noted that in some embodiments, instead ofreceiving values of one or more variables from the x, y, and/or zcontrollers, the host controller 150 receives the values from one ormore sensors. The x, y, and/or z controllers do not act asintermediaries between the host controller 150 and the one or moresensors.

In various embodiments, each of the variable requester 170, the variablereceiver 110, the model 113, the model value generator 115, the dataamount calculator 112, the limit crossover determination module 114, thestatistical determination module 116, the switch module 180, the datadeletion module 120, the RF control block 197, and the sender 174 areimplemented as separate processors. For example, the variable requester170 is implemented as one processor and the data amount calculator 112is implemented as another processor.

In a number of embodiments, one or more of the variable requester 170,the variable receiver 110, the model 113, the model value generator 115,the data amount calculator 112, the limit crossover determination module114, the statistical determination module 116, the switch module 180,the data deletion module 120, the RF control block 197, and the sender174 are implemented as one processor and any remaining of the variablerequester 170, the variable receiver 110, the model 113, the model valuegenerator 115, the data amount calculator 112, the limit crossoverdetermination module 114, the statistical determination module 116, theswitch module 180, the data deletion module 120, the RF control block197, and the sender 174 are implemented as another processor.

In some embodiments, instead of grounding the upper electrode 154, theupper electrode 154 is provided RF power. In various embodiments,instead of grounding the upper electrode 154, the lower electrode of thechuck 152 is grounded and the RF transmission line provided RF power tothe upper electrode 154.

In various embodiments, a statistical value is stored in a storagedevice of the SD module 116. A size of the storage device of the SDmodule 116 is less than a size of the storage device of the variablereceiver 110. For example, the storage device of the SD module 116includes a single memory location and the storage device of the variablereceiver 110 includes multiple memory locations. As another example, thestorage device of the SD module 116 includes a lower number of memorylocations than that of the storage device of the variable receiver 110.

It should be noted that in some embodiments, the host controller 150includes a number of processors, e.g., one, two, three, etc., togenerate a statistical value and to control the plasma chamber 111 andthe number of processors is cost-effective. For example, instead ofusing a separate processor or a separate server to control the plasmachamber 111, e.g., use one processor to control a temperature within theplasma chamber 111, use another processor to control a gap within theplasma chamber 111, use another processor to control a pressure withinthe plasma chamber 111, use yet another processor to control a frequencyof a signal received by the plasma chamber 111, use still anotherprocessor control a power of the signal, or a combination thereof, etc.,one processor is used to generate a statistical value and to control theplasma chamber 111. The processor controls the plasma chamber 111 basedon a statistical value.

Examples of controlling the plasma chamber 111 include changing afrequency of an RF signal that is generated by an RF generator, orchanging a power of the RF signal, or changing a temperature within theplasma chamber 111, or changing a gap within the plasma chamber 111, orchanging a pressure within the plasma chamber 111, or a combinationthereof.

In some embodiments, a processor of the host controller 150 controls agas supply valve (not shown) that facilitates supply of a gas from a gasreservoir (not shown) to gas inlets of the upper electrode 154. Forexample, a processor of the host controller 150 controls a driver, e.g.,a transistor, a group of transistors, etc., that supplies a current toopen or close the gas supply valve by an amount to control a supply of agas, e.g., the process gas, etc., to the plasma chamber 111. The controlof the supply also allows the processor to control the pressure withinthe plasma chamber 111 in which the gas is supplied.

In various embodiments, the upper electrode 154 is raised up or downusing a motor-driven screw mechanism (not shown). A processor of thehost controller 150 controls the motor-driven screw mechanism via adriver, e.g., a transistor, a group of transistors, etc., to move theupper electrode 154 up or down to control, e.g., change, increase,decrease, etc., a gap between the upper electrode 154 and the chuck 152.

In several embodiments, a heater is included within the chuck 152 andthe heater is controlled by a processor of the host controller 150 via adriver, e.g., a transistor, a group of transistors, etc., to control,e.g., change, increase, decrease, etc., temperature within the plasmachamber 111.

In a number of embodiments, a heat transfer mechanism, e.g., a duct,etc., is provided within the plasma chamber 111 and a flow of a coolingliquid is controlled by a processor of the host controller 150 via avalve and a driver, e.g., a transistor, a group of transistors, etc., tocontrol temperature within the plasma chamber 111.

FIG. 2 is a diagram of an embodiment of a plasma system 151 forgenerating a statistical value of a variable. The plasma system 151includes the plasma chamber 111, the impedance matching circuit 106, thex, y, and z MHz RF generators, and a host system 190. The host system190 includes a host controller 192.

In some embodiments, the plasma system 151 is the same as the plasmasystem 100 (FIG. 1) except that the plasma system 151 includes the hostsystem 190 instead of the host system 140 (FIG. 1). For example, theplasma system 151 is structurally the same as the plasma system 100(FIG. 1) except that the plasma system 151 includes the host controller192 instead of the host controller 150 (FIG. 1).

The host controller 192 is the same as the host controller 150 (FIG. 1)except that the host controller 192 includes a bias compensation module196, an event detection module 198, and a communication block 191. TheRF control block 197 is connected to the bias compensation module 196and the event detection module 198. The SD module 116 is connected tothe bias compensation module 196 and the event detection module 198.

The bias compensation module 196 determines whether a statistical valueof a variable that is received from the RF control block 197 or from theSD block 116 is within a pre-determined range, which is pre-stored in astorage device of the bias compensation module 196.

In some embodiments, the bias compensation module 196 has a multiplepre-determined ranges for multiple statistical values of a variable. Forexample, a storage device of the bias compensation module 196 stores afirst pre-determined range for a statistical value of a variable that isgenerated from data of the variable received from the x controller. Asanother example, a storage device of the bias compensation module 196stores a second pre-determined range for a statistical value of avariable that is generated from data of the variable received from the ycontroller. In various embodiments, the first pre-determined range isthe same as the second pre-determined range. In some embodiments, thefirst pre-determined range is different from the second pre-determinedrange.

Upon determining that a statistical value of a variable is within apre-determined range, the bias compensation module 196 sends thestatistical value to the sender 174, which sends the statistical valuevia one or more communications links to corresponding one of the x, y,and z controllers. On the other hand, upon determining that astatistical value of a variable is not within a pre-determined range,the bias compensation module 196 adjusts, e.g., modifies, alters,increases, decreases, tunes, etc., the statistical value to be withinthe pre-determined range and provides the adjusted statistical value tothe sender 174.

The sender 174 sends the adjusted statistical value of a variable viaone or more communication channels to corresponding one or more of thex, y, and z controllers.

A controller of an RF generator receives an adjusted statistical valueof a variable from the sender 174 via a communication channel thatcouples the controller to the sender 174 and provides the adjustedstatistical value to an RF supply of the RF generator. For example, thex controller receives an adjusted statistical value of a variable andprovides the adjusted statistical value to the RF supply 186. An RFsupply of an RF generator generates an RF signal, e.g., an RF signal155, etc., that includes the adjusted statistical value. For example,the RF signal 155 has a power of the adjusted statistical value. Asanother example, the RF signal 155 has a frequency of the adjustedstatistical value.

In a manner similar to that described above, the impedance matchingcircuit 106 receives one or more RF signals from corresponding one ormore RF cables that are coupled to corresponding one or more of the x,y, and z MHz RF generators. The impedance matching circuit 106 generatesa modified RF signal based on the one or more RF signals received andsends the modified RF signal via the RF cable 132 to the chuck 152.Based on the modified RF signal received, plasma is generated within theplasma chamber 111 or when plasma is already generated at the time ofreceipt of the modified RF signal, properties of the plasma are modifiedbased on the modified RF signal.

The event detection module 198 receives a statistical value of avariable from the RF control block 197 or from the SD module 116 anddetermines whether the statistical value is within a pre-determinedextent, which is pre-stored in a storage device of the event detectionmodule 198. In some embodiments, a pre-determined extent is the same asa pre-determined range. In various embodiments, a pre-determined extentis a range different from a pre-determined range.

In some embodiments, the event detection module 198 has a multiplepre-determined extents for multiple statistical values of a variable.For example, a storage device of the event detection module 198 stores afirst pre-determined extent for a statistical value of a variable thatis generated from data of the variable received from the x controller.As another example, a storage device of the event detection module 198stores a second pre-determined extent for a statistical value of avariable that is generated from data of the variable received from the ycontroller. In various embodiments, the first pre-determined extent isthe same as the second pre-determined extent. In some embodiments, thefirst pre-determined extent is different from the second pre-determinedextent.

Upon determining that a statistical value of a variable is within apre-determined extent, a fault signal is not generated by the eventdetection module 198. On the other hand, upon determining that astatistical value of a variable is outside a pre-determined extent, afault signal is generated by the event detection module 198 and providedto the sender 174.

The sender 174 sends a fault signal via one or more communicationchannels to corresponding x, y, and z controllers. For example, thesender 174 sends a fault signal via a communication channel 202 to the xcontroller and sends a fault signal via a communication channel to the ycontroller.

A controller of an RF generator receives a fault signal and responds tothe fault signal. For example, a controller of an RF generator sends asignal to an RF supply of the RF generator to pause generation of an RFsignal for sending to the impedance matching circuit 106. As anotherexample, a controller of an RF generator sends a signal to an RF supplyof the RF generator to pause generation of an RF signal for sending tothe impedance matching circuit 106 until an adjusted statistical valuethat is compensated for bias is received via the sender 174 from thebias compensation module 196.

In some embodiments, the event detection module 198 sends a faultdetection signal via the communication block 191 to a remote computersystem for notifying the remote computer system of a fault in astatistical value of a variable. Examples of a communication block 191include a network interface controller, such as, for example, a networkinterface adapter or a network interface card.

Examples of the remote computer system include a computer, a server, aprocessor, a cell phone, a smart phone, a tablet, etc., which isoperated by a user. The user views the notification on a display device,e.g., a cathode ray tube display, a liquid crystal display device, alight emitting diode display device, a plasma display device, etc., ofthe remote computer system and decides to take action to resolve thefault.

In various embodiments, the SD module 116 is connected to thecommunication block 191 for sending a statistical value of a variable tothe remote computer system.

In various embodiments, each of the variable requester 170, the variablereceiver 110, the data amount calculator 112, the model 113, the limitcrossover determination module 114, the model value generator 115, thestatistical determination module 116, the switch module 180, the datadeletion module 120, the bias compensation module 196, the eventdetection module 198, the RF control block 197, the sender 174, and thecommunication block 191 are implemented as separate processors. Forexample, the variable requester 170 is implemented as one processor andthe data amount calculator 112 is implemented as another processor.

In a number of embodiments, one or more of the variable requester 170,the variable receiver 110, the data amount calculator 112, the model113, the limit crossover determination module 114, the model valuegenerator 115, the statistical determination module 116, the switchmodule 180, the data deletion module 120, the bias compensation module196, the event detection module 198, the RF control block 197, thesender 174, and the communication block 191 are implemented as oneprocessor and any remaining of the variable requester 170, the variablereceiver 110, the data amount calculator 112, the model 113, the limitcrossover determination module 114, the model value generator 115, thestatistical determination module 116, the switch module 180, the datadeletion module 120, the bias compensation module 196, the eventdetection module 198, the RF control block 197, the sender 174, and thecommunication block 191 are implemented as another processor.

In some embodiments, the host controller 192 excludes the data deletionmodule 120 and the switch 180. In these embodiments, no decimation isperformed in the host system 190. In these embodiments, all values of avariable are stored within one or more storage devices of the hostsystem 190, or sent to the remote computer system for storage via thecommunication block 191, or sent for storage via the communication block191 to a virtual machine, etc.

FIG. 3 is a diagram of an embodiment of a host system 400, which is anexample of the host system 190 (FIG. 2). The host system 400 includes afield programmable gate array (FPGA) 402 and a microprocessor 404. Itshould be noted that instead of the FPGA 402, any other integratedcircuit, e.g., an ASIC, etc., may be used. Moreover, instead of themicroprocessor 404, any other integrated circuit, e.g., FPGA, ASIC,etc., may be used.

The FPGA 402 includes a multiple serial parallel interface (SPI) (MSPI)406, which includes one or more PSPIs. The MSPI 406 includes 27 pins,which includes 9 pins each for a PSPI. For example, the MSPI 406includes a PSPI that is connected to the x controller, a PSPI that isconnected to the y controller, and a PSPI that is connected to the zcontroller (FIG. 2). The MSPI 406 receives data, e.g., power read backfrom serial data output (SDO) ports of the x, y, and z controllers,frequency read back from SDO ports of the x, y, and z controllers, realportion of plasma impedance read back from SDO ports of the x, y, and zcontrollers, imaginary portion of plasma impedance read back from SDOports of the x, y, and z controllers, and other variables, etc., fromthe PSPIs of the x, y, and z controllers, and sends the data to asoft-core digital signal processor (DSP) 408 and/or to a high-speed port410.

The soft-core DSP 408 includes the model 113 and the model valuegenerator 115. For example, the FPGA 402 implements an electricalcircuit that includes electrical components, e.g., capacitors, orinductors, etc., of the RF transmission line 132. Moreover, the FPGA 402connects the components within the electrical circuit in the samemanner, e.g., serial, parallel, etc., as that in which electricalcomponents of the electrical circuit of the RF transmission line 132 areconnected.

Data of variables received by the MSPI 406 are sent from the MSPI 406 tothe soft-core DSP 408. The model value generator 115 of the soft-coreDSP 408 generates values of variables at an output of the model 113based on values received from the MSPI 406 and sends the generatedvalues via the high-speed port 410 and a high-speed bus 412 to ahigh-speed bus port 415 of the microprocessor 404. Examples of ahigh-speed bus include a bus that transfers data at 500 MHz, or at 400MHz, or at 300 MHz, or at 600 MHz, or between 5 MHz and 500 MHz, etc.Data of variables is communicated via the high-speed port 415 to an SDDlogic block 416, which is an example of the SDD 172 (FIG. 2).

In some embodiments, a logic block is a computer program that isexecuted by one or more processors, e.g., the SDD logic block 416 isexecuted by the microprocessor 404. In several embodiments, a logicblock is implemented as hardware within an integrated circuit. Invarious embodiments, a logic block is implemented as a combination of acomputer program and hardware.

The SDD logic block 416 applies a statistical transformation to data ofvariables received via the high-speed port 415 from the soft-core DSP408 to generate a statistical value. For example, the SDD logic block416 generates a mean, or a median, or a mode, or a standard deviation,or a maximum, or a minimum, or an interquartile range (IQR), etc., fromdata of variables received via the high-speed port 415 from thesoft-core DSP 408 to generate a statistical value. As another example,the SDD logic block 416 generates a moving mean of multiple values ofpower received from the soft-core DSP 408. As yet another example, theSDD logic block 416 generates a moving median of multiple values of areal portion of plasma impedance received from the soft-core DSP 408. Asanother example, the SDD logic block 416 generates a moving IQR, or anIQR, or a maximum value, or a minimum value, or a mean value, or amedian value, or a variance, or a standard deviation, or a moving mean,or a moving median, or a moving variance, or a moving standarddeviation, or a mode, or a moving mode, or a combination thereof, etc.,from data values of variables from the soft-core DSP 408 to generate astatistical value.

In a number of embodiments, the SDD logic block 416 deletes one or morevalues of a variable received over a time window except for astatistical value of the variable. For example, the SDD logic block 416erases, from a storage device, within the host system 400, values ofimaginary portion of plasma impedance except for a median of the values.As another example, the SDD logic block 416 erases, from a storagedevice, within the host system 400, values of frequency except for amode of the values.

In some embodiments, no decimation is performed in the host system 400.In these embodiments, all values of a variable are stored within one ormore storage devices of the host system 400, or sent to the remotecomputer system for storage via a VME communication block 422, or sentfor storage via the VME communication block 422 to a virtual machine,etc. Examples of the VME communication block 422 include an Ethernetcommunication block, an EtherCAT communication block, a Universal SerialBus (USB) port, a network interface controller, a serial port, and aparallel port. The VME communication block is an example of thecommunication block 191 (FIG. 2).

A bias compensation module 418, which is an example of the biascompensation module 196 (FIG. 2), determines an amount of bias based ona statistical value received from the SDD logic block 416 to compensatefor the bias. For example, upon determining that a statistical value isoutside a pre-determined range, the bias compensation module 418 adjuststhe statistical value to be within the pre-determined range.

In some embodiments, the bias compensation module 418 provides theadjusted statistical value via the high-speed port 415, the high-speedbus 412, the high-speed port 410, the MSPI 406, and a communicationchannel to a controller of an RF generator. In various embodiments, thebias compensation module 418 provides the adjusted statistical value viathe VME communication block 422 to a port, e.g., an Ethernet port, anEtherCAT port, a USB port, a parallel port, a serial port, etc., of anRF generator, or to a port of the remote computer system.

The microprocessor 404 includes an event/fault detection module 420 thatdetects an event, e.g., a fault, etc., at a point within the plasmasystem 151 (FIG. 2), e.g., at a point within the plasma chamber 111, orat a point within the impedance matching circuit 106, or at a point onthe RF transmission line 132 (FIG. 2), or at a point within the x MHz RFgenerator, or at a point within the y MHz RF generator, or at a pointwithin the z MHz RF generator, or at a point on an RF cable that couplesan RF generator to the impedance matching circuit 106, etc. For example,upon determining that a statistical value received from the SD logicbock 416 is outside a pre-determined range, the event/fault detectionmodule 420 determines that an event has occurred within the plasmasystem 151 (FIG. 2). An indication of an occurrence of the event is sentfrom the event/fault detection module 420 via the VME communicationblock 422 to one or more devices, e.g., the x MHz RF generator, the yMHz RF generator, the z MHz RF generator, the remote computer system,etc. The event/fault detection module 420 is an example of theevent/fault detection module 198 (FIG. 2).

FIG. 4 is a block diagram of an embodiment of a host system 450, whichis another example of the host system 190 (FIG. 2). The host system 450is similar to the host system 400 (FIG. 4) except that the host system450 includes a microprocessor 452 and an FPGA 403. The microprocessor452 is similar to the microprocessor 404 (FIG. 3) except that themicroprocessor 452 includes a variable module 454. Moreover, the FPGA403 is similar to the FPGA 402 except that the FPGA 403 excludes thesoft-core DSP 408 (FIG. 3).

The model value generator 115 of the variable module 454 receives dataof one or more variables from the MSPI 406 via the high-speed port 410,the high-speed bus 412, and the high-speed port 415. The model valuegenerator 115 of the variable module 454 determines data of variables atan output of the model 113 based on data of variables received from theMSPI 406 and characteristics, e.g., capacitance, impedance, etc., of themodel 113. For example, when plasma impedance received via the MSPI 406is Z1 and an impedance of elements of the RF transmission model is Z2,the model value generator 115 determines an impedance at an output ofthe RF transmission model to be a directional sum of Z1 and Z2. Asanother example, when a complex voltage and current received via threecommunication channels is complex V&I1 and a complex voltage and currentof the RF transmission model is complex V&I2, the model value generator115 determines a complex V&I at an output of the RF transmission modelto be a directional sum of V&I1 and V&I2.

The SDD logic block 416 receives data of variables generated by thevariable module 454 and determines a statistical value from the data ina manner similar to that explained above. Moreover, the biascompensation module 418 receives a statistical value from the SDD logicblock 416 and determines a bias to apply to the plasma chamber 111(FIG. 1) based on the statistical value. For example, upon determiningthat a statistical value is outside a pre-determined range, the biascompensation module 418 adjusts the statistical value to be within thepre-determined range.

The bias compensation module 418 sends the adjusted statistical value ina similar manner as that described above to one or more PSPIs of one ormore of the x, y, and z controllers (FIG. 2). For example, the biascompensation module 418 determines an adjusted statistical value ofpower and an adjusted statistical value of frequency and provides theadjusted statistical values via the high-speed port 415, the high-speedbus 412, the high-speed port 410, the MSPI 406, and communicationchannels to the x controller. In some embodiments, the bias compensationmodule 418 sends the adjusted statistical value via the VMEcommunication block 422 to a port, e.g., an Ethernet port, an EtherCATport, a USB port, a parallel port, a serial port, etc., of an RFgenerator or to a port of the remote computer system.

The event/fault detection module 420 detects an event within the plasmasystem 151 (FIG. 2) based on a statistical value received from the SDDlogic block 416. For example, upon determining that the statisticalvalue is outside a pre-determined extent, the event/fault detectionmodule 420 determines that an event has occurred within the plasmasystem 151. The statistical value is generated from data of variablesthat is generated by the variable module 454.

An indication of the occurrence of the event is sent from theevent/fault detection module 420 via the VME communication block 422 toone or more devices, e.g., the remote computer system, the x MHz RFgenerator, the y MHz RF generator, the z MHz RF generator, etc. The userviews the indication on the display device of the remote computer systemand may decide to take action to resolve the fault.

FIG. 5 is a diagram of an embodiment of a storage device 500 forillustrating use of pointers to access a memory location. The storagedevice 500 is within the variable receiver 110 (FIGS. 1 & 2). In someembodiments, the storage device 500 is within the data amount calculator112, or the limit crossover determination module 114, or the SD module116.

The storage device 500 includes a memory array 1 and a memory array 2.The memory array 1 stores data of a variable and the memory array 2stores memory addresses of locations within the memory array 1. Examplesof data of a variable is shown as index 0, index 1, index 2, index 3,and index 4.

As shown, data of a variable is received within the memory array 1 andstored in memory addresses 0x0, 0x1, 0x2, 0x3, and 0x4. When data of avariable is received within the memory array 1, pointer to the data isgenerated within the memory array 2 by a processor, e.g., a processor ofthe data amount calculator 112, or a processor of the limit crossoverdetermination module 114, or a processor of the SD module 116, etc. A0x0 pointer is stored in a memory address 0x5 and points to the valueindex 0. A 0x1 pointer is stored in a memory address 0x6 and points tothe value index 1. Moreover, a 0x2 pointer is stored in a memory address0x7 and points to the value index 2, a 0x3 pointer is stored in a memoryaddress 0x8 and points to the value index 3, and a 0x4 pointer is storedin a memory address 0x9 and points to the value index 4.

Although five values are shown in FIG. 5, in some embodiments, more orless than five values are stored in the memory array 1.

It should be noted that in some embodiments, pointers are used to pointto a memory address to access, modify, or delete data of a variable atthe memory address. In various embodiments, a pointer is used to changea location of a value within a storage device. Each location in astorage device, e.g., a memory array, a group of memory arrays, etc., isidentified by a memory address.

FIG. 6 is a diagram of an embodiment of an insertion sort operation.Data of a variable is stored within a memory array 502, which is anexample of the memory array 1 (FIG. 5). For example, 1, 2, 5, 3, and 4are values of a variable stored within the memory array 502. In theinsertion sort operation, a comparison is performed between each valueof the memory array 502 and remaining values of the memory array 502 tosort values of the memory array 502 from a lowest of all the values to ahighest of all the values. For example, 5 is compared with 2. It isdetermined that 5 is greater than 2 and so a pointer that points to athird location from the left in the memory array 502 still points to thethird location. As another example, 5 is compared with 1. It isdetermined that 5 is greater than 1 and so a pointer that points to athird location from the left in the memory array 502 still points to thethird location. As yet another example, 3 is compared with 5 and it isdetermined that 3 is lower than 5. Moreover, a pointer that points to athird location from the left in the memory array 502 is changed to pointto a fourth location from the left in the memory array 502 and a pointerthat points to the fourth location is now changed to point to the thirdlocation. In this example, 3 is made to switch places with 5 in thememory array 502.

The sorting is performed to sort the values in the memory array 502 fromthe lowest of the values to the highest of the values to determine aminimum value and a maximum value from the values.

Although five values are shown in FIG. 6, in some embodiments, more orless than five values are stored in the memory array 502.

FIG. 7 is a diagram of an embodiment of three memory arrays 504, 506,and 508 to illustrate a merge sort operation. The memory arrays 504,506, and 508 are parts of a storage device 510. The storage device 510is within the variable receiver 110 (FIGS. 1 & 2). In some embodiments,the storage device 510 is within the data amount calculator 112, or thelimit crossover determination module 114, or the SD module 116. Invarious embodiments, the memory arrays 504 and 506 are within a storagedevice of the variable receiver 110 and the merged memory array 508 iswithin a storage device of the SD module 116.

The values of a variable within the memory arrays 504 and 506 aregenerated after performing an insertion sort operation. For example,values of a variable within the memory array 504 is sorted from a lowestof all values within the memory array 504 to a highest of all values inthe memory array 504. As another example, values of a variable withinthe memory array 506 is sorted from a lowest of all values within thememory array 506 to a highest of all values in the memory array 506.

Data of a variable is received within the memory arrays 504 and 506.During a merge sort operation, a maximum of all values of the memoryarray 504 is determined and a minimum of all values of the memory array506 is determined. It is further determined whether the minimum value inthe memory array 506 is greater than the maximum value of the memoryarray 504.

Upon determining that the minimum value in the memory array 506 is notgreater than the maximum value in the memory array 504, each value ofthe memory array 504 is compared with each value in the memory array506. On the other hand, upon determining that the minimum value in thememory array 506 is greater than the maximum value in the memory array504, a comparison is not performed between values of the memory arrays504 and 506. In the case the comparison is not performed, the mergedmemory array 508 that includes all values of the memory arrays 504 and506 is generated. For example, values of the memory arrays 504 and 506are written into the merged memory array 508 in an order of the valueswithin the memory arrays 504 and 506.

In various embodiments, a memory address of the memory array 506 inwhich a value “7” is stored is immediately after, e.g., right next to,is consecutive to, etc., a memory address of the memory array 504 inwhich a value “6” is stored. In some embodiments, a memory address ofthe memory array 506 in which the value “7” is stored is after, e.g.,not right next to, within two memory addresses of, within a number ofmemory addresses of, etc., but not immediately after a memory address ofthe memory array 504 in which the value “6” is stored.

In various embodiments, the memory arrays 504 and 506 are separated by anumber, e.g., one, two, etc., of empty memory addresses.

It should be noted that although each memory array 504 and 506 includessix values, in some embodiments, each memory array 504 and 506 includesa different number of values of a variable.

In various embodiments, the merged memory array 508 has the same size,e.g., number of memory addresses, etc., as that of a total number ofmemory addresses in the memory arrays 504 and 506.

FIG. 8 is a diagram of an embodiment of a storage device 550 toillustrate a comparison operation within a merge sort operation. Thestorage device 550 includes memory arrays 552 and 554, and a mergedmemory array 556. The memory arrays 552, 554, and 556 are parts of thestorage device 550, which is located within the variable receiver 110(FIGS. 1 & 2). In some embodiments, the storage device 550 is within thedata amount calculator 112, or the limit crossover determination module114, or the SD module 116. In various embodiments, the memory arrays 552and 554 are within a storage device of the variable receiver 110 and themerged memory array 556 is within a storage device of the SD module 116.

While performing a one-by-one comparison between values of the memoryarrays 552 and 554, it is determined whether a value within a memoryaddress of the memory array 552 is less than a value within a memoryaddress of the memory array 554. For example, it is determined whether avalue “4” of the memory array 552 is less than a value “3” of the memoryarray 554. As another example, each value of a variable within thememory array 552 is compared with each value of a variable within thememory array 554 in an order of memory addresses within the memory array552 and 554. To further illustrate the order of comparison, a value “1”within a memory address MA1 of the memory array 552 is compared withvalues “3”, “5”, “6”, and “8” in memory addresses MA5, MA6, MA7, and MA8of the memory array 554. Then, a value “2” in a memory address MA2 ofthe memory array 552 is compared with values “3”, “5”, “6”, and “8” inmemory addresses MA5, MA6, MA7, and MA8 of the memory array 554. Thememory address MA1 is lower than the memory address MA2.

Upon determining that a value within a memory address of one of thememory arrays 552 and 554 is less than a value within a memory addressof the remaining of the memory arrays 552 and 554, it is determined toinsert, e.g., write, etc., the lesser value into an empty memory addresswithin the merged memory array 556. For example, upon determining thatthe value “3” within the memory array 554 is less than the value “4”within the memory array 552, the value “3” is written into a memoryaddress 558 of the merged memory array 556. As another example, upondetermining that the value “4” within the memory array 552 is less thanthe value “5” within the memory array 554, the value “4” is written intoa memory address 560 of the merged memory array 556. The empty memoryaddress within the merged memory array 556 is consecutive to an occupiedmemory address of the merged memory array 556.

During a merge sort operation, after a comparison is performed betweenvalues of the memory arrays 552 and 554, any value of the memory array554 that is not written into the merged array 556 is compared withremaining unwritten values of the memory array 554. For example, thevalue “5” of the memory array 554 is compared with a value “6” of thememory array 554. The comparison is performed in an order of memoryaddresses of the memory array 554 that include values that are yet notwritten into the merged memory array 556. For example, in case in whichvalues “5”, “6”, and “8” are not written in the merged memory array 556,the value “5” within a lowest memory address from memory addresses inwhich the values “5”, “6”, and “8” are stored in the memory array 554 iscompared with the values “6” and “8”. The memory address of the value“6” is lower than the memory address of the value “8” in the memoryarray 554.

During a merge sort operation, while comparing the unwritten values, alesser of the unwritten values is written into the merged memory array556. For example, when a comparison is performed between the values “5”and “6” in the memory array 554, the value “5” is written into themerged memory array 556. As another example, when a comparison isperformed between the values “6” and “8” in the memory array 554, thevalue “6” is written into the memory array 556. Any remaining valueafter the comparison of the unwritten values is written into an emptyaddress of the merged memory array 556 that is consecutive to a memoryaddress that is written with a value. For example, the value “8” of thememory array 554 is written into a memory address 562 of the memoryarray 556.

At an end of a merge sort operation, the merged memory array 556 issorted from a lowest of all values within the memory arrays 552 and 554to a highest of all values of the memory arrays 552 and 554.

It should be noted that although each memory array 552 and 554 includesfour values, in some embodiments, each memory array 552 and 554 includesa different number of values of a variable.

In various embodiments, the memory arrays 552 and 554 are separated by anumber, e.g., one, two, etc., of empty memory addresses. In someembodiments, the memory address MA5 is consecutive to a memory addressMA4 of the memory array 552.

In various embodiments, the merged memory array 556 has the same size asthat of a total number of memory addresses in the memory arrays 552 and554.

FIG. 9 is a diagram of an embodiment of an SD module 580, which is anexample of the SD module 116 (FIGS. 1 and 2). The SD module 580 includesa moving IQR module, an IQR module, an insertion sort module, a mergesort module, a mode module, a moving mode module, a mean module, amedian module, a variance module, a standard deviation module, a movingmean module, a moving median module, a moving variance module, and amoving standard deviation module.

The moving IQR module determines a moving IQR of values of a variablewithin a memory array, e.g., the memory array 502 (FIG. 6), or thememory array 504 (FIG. 7), or the memory array 506 (FIG. 7), or themerged memory array 508 (FIG. 7), or the memory array 552 (FIG. 8), orthe memory array 554 (FIG. 8), or the merged memory array 556 (FIG. 8),etc. Similarly, the IQR module calculates an IQR of values of a variablewithin a memory array. Moreover, the insertion sort module applies aninsertion sort operation to values of a variable within a memory array.The merge sort module applies a merge sort operation to values of avariable within a memory array. The mode module determines a mode ofvalues of a variable within a memory array. Similarly, the moving modemodule determines a moving mode of values of a variable within a memoryarray. The mean module calculates an average of values of a variablewithin a memory array. The median module generates a median of values ofa variable within a memory array.

The variance module calculates a variance of values within a memoryarray and the standard deviation module determines a standard deviationof values within a memory array. The moving mean module calculates amoving average of values of a variable within a memory array and themoving median module determines a moving median of values of a variablewithin a memory array. The moving variance module calculates a movingvariance of values within a memory array and the moving variance moduledetermines a moving variance of values within a memory array. The movingstandard deviation generates a moving standard deviation of valueswithin a memory array.

A moving statistical value, e.g., a moving IQR value, or a moving modevalue, or a moving mean value, or a moving median value, or a movingvariance value, or a moving standard deviation value, etc., is a valuethat dynamically considers values of a variable as the values are beingreceived by a memory array, e.g., a buffer of the SD module 116 (FIGS. 1& 2), from the model value generator 115 (FIGS. 1 & 2), etc. Forexample, a moving average of values “1”, “2”, and “5” in the memoryarray 502 (FIG. 6) at a time the values “3” and “4” of the memory array502 are not received is different than a moving average of values “1”,“2”, “5”, “3” and “4”. As another example, a moving standard deviationof values “1”, “2”, and “3” in the merged memory array 556 (FIG. 8) at atime the remaining values “3” and “4” of the merged memory array 556 arenot generated within the merged memory array 556 is different than amoving average of the values “1”, “2”, “3”, “3” and “4” of the mergedmemory array 556.

In various embodiments, a rate of receipt of values within a buffer ofthe SD module 116 from the model value generator 115 is the same as therate of receipt of values by the variable receiver 110 (FIGS. 1 & 2).

In some embodiments, the SD module 580 includes the moving IQR module,or the IQR module, or the insertion sort module, or the merge sortmodule, or the mode module, or the moving mode module, or the meanmodule, or the median module, or the variance module, or the standarddeviation module, or the moving mean module, or the moving medianmodule, or the moving variance module, or the moving standard deviationmodule, or a combination thereof. For example, the SD module 580includes the moving IQR module and the insertion sort module. As anotherexample, the SD module 580 includes the merge sort module and the movingmean module and the moving standard deviation module.

In various embodiments, each of the moving IQR module, and the IQRmodule, and the insertion sort module, and the merge sort module, andthe mode module, and the moving mode module, and the mean module, andthe median module, and the variance module, and the standard deviationmodule, and the moving mean module, and the moving median module, andthe moving variance module, and the moving standard deviation module areimplemented as separate processors. For example, the moving IQR moduleis implemented as one processor and the mode module is implemented asanother processor.

In a number of embodiments, one or more of the moving IQR module, theIQR module, the insertion sort module, the merge sort module, the modemodule, the moving mode module, the mean module, the median module, thevariance module, the standard deviation module, the moving mean module,the moving median module, the moving variance module, and the movingstandard deviation module are implemented as one processor and anyremaining of the moving IQR module, the IQR module, the insertion sortmodule, the merge sort module, the mode module, the moving mode module,the mean module, the median module, the variance module, the standarddeviation module, the moving mean module, the moving median module, themoving variance module, and the moving standard deviation module areimplemented as another processor.

In a number of embodiments, each of the moving IQR module, the IQRmodule, the insertion sort module, the merge sort module, the modemodule, the moving mode module, the mean module, the median module, thevariance module, the standard deviation module, the moving mean module,the moving median module, the moving variance module, and the movingstandard deviation module is implemented as a computer program stored ina non-transitory computer-readable medium, or as hardware, or acombination of the hardware and the computer program.

In some embodiments, a mean is calculated in parallel with performing aninsertion sort operation. For example, values of a variable are summedin parallel with sorting the values from a minimum of the values to amaximum of the values.

In several embodiments, an IQR or a median is determined afterperforming an insertion sort operation. After the insertion sortoperation is performed, values of a variable are sorted from a lowest ofthe values to a highest of the values. When the number of values is odd,a value located in middle of the sorted values is a median. When thenumber of values is even, an average of two values located in middle ofthe sorted values is a median. The median calculated is used todetermine IQR.

In various embodiments, a mean is calculated in parallel with performinga merge sort operation. The mean is calculated from all values that aresorted after the merge sort operation.

In several embodiments, an IQR or a median is determined afterperforming a merge sort operation. After the merge sort operation isperformed, values of a variable are sorted from a lowest of the valuesto a highest of the values. When the number of values is odd, a valuelocated in middle of the sorted values is a median. When the number ofvalues is even, an average of two values located in middle of the sortedvalues is a median. The median calculated is used to determine IQR.

FIG. 10 is a diagram of an embodiment of an SD module 590, which is anexample of the SD module 116 (FIGS. 1 and 2). The SD module 590 includesthe moving IQR module, the IQR module, the insertion sort module, themerge sort module, the mode module, the moving mode module, the meanmodule, the median module, the variance module, the standard deviationmodule, the moving mean module, the moving median module, the movingvariance module, and the moving standard deviation module.

Moreover, in the SD module 590, the merge sort module is connected tothe moving IQR module, to the IQR module, to the insertion sort module,to the mode module, to the moving mode module, to the mean module, tothe median module, to the variance module, to the standard deviationmodule, to the moving mean module, to the moving median module, to themoving variance module, and to the moving standard deviation module.

The moving IQR module calculates a moving IQR of values within a mergedmemory array, e.g., the merged memory array 508 (FIG. 7) or the mergedmemory array 556 (FIG. 8), etc. Similarly, the IQR module calculates anIQR of values within a merged memory array. Moreover, mean modulecalculates a mean of values within a merged memory array. The medianmodule generates a median of values within a merged memory array. Themode module generates a mode of values within a merged memory array andthe moving mode module calculates a moving mode of values within amerged memory array. Moreover, the variance module calculates a varianceof values within a merged memory array. The standard deviation moduledetermines a standard deviation of values within a merged memory arrayand the moving mean module calculates a moving mean of values within amerged memory array. The moving median module determines a moving medianof values within a merged memory array and the moving variance modulecalculates a moving variance of values within a merged memory array. Themoving standard deviation module generates a moving standard deviationof values within a merged memory array.

In some embodiments, the SD module 590 includes the moving IQR module,or the IQR module, or the insertion sort module, or the merge sortmodule, or the mode module, or the moving mode module, or the meanmodule, or the median module, or the variance module, or the standarddeviation module, or the moving mean module, or the moving medianmodule, or the moving variance module, or the moving standard deviationmodule, or a combination thereof.

FIG. 11 is a diagram of an embodiment of a system 601 for applying atime slice sampling method. The system 601 includes the biascompensation module 196 and the event detection module 198. The biascompensation module 196 and/or the event detection module 198 receives atime of generation of a value of a variable from the SD module 116(FIGS. 1 & 2). For example, a time t1 is a time of generation of avariable value V21 by the SD module 116. As another example, a time t2is a time of generation of a variable value V22 by the SD module 116, atime t3 is a time of generation of a variable value V23 by the SD module116, and a time t4 is a time of generation of a variable value V24 bythe SD module 116. As yet another example, a time t5 is a time ofgeneration of a variable value V25 by the SD module 116 and ofgeneration of a variable value V11 by the SD module 116. The times t1thru t5 are calculated by the SD module 116. In some embodiments, thetime t1 is a time of generation of the variable value V15 and of thevariable V21.

In some embodiments, Variable values V11, V12, V13, V14, and V15 arevalues of a first variable, which is variable 1. Variable values V21,V22, V23, V24, and V25 are values of a second variable, which isvariable 2. The variable 1 is different from the variable 2. Forexample, the variable 1 is power and the variable 2 is voltage. Asanother example, the variable 1 is current and the variable 2 isvoltage.

In various embodiments, the variable 1 and the variable 2 are the samevariable and generated based on values from different RF generators. Forexample, the variable 1 is generated from voltage values of the x MHz RFgenerator and the variable 2 is generated from voltage values of the yMHz RF generator. As another example, the variable 1 is generated fromfrequency values of the y MHz RF generator and the variable 2 isgenerated from frequency values of the z MHz RF generator.

The variables V11 thru V15 are stored in a memory array, e.g., aninsertion sorted array, a merged array, etc., of the SD module 116(FIGS. 1 & 2). For example, the variable values V11 thru V15 are sortedfrom a lowest of the values to a highest of the values. In this example,V11 is the lowest value and V15 is the highest value. Moreover, thevariables V21 thru V25 are stored in a memory array, e.g., an insertionsorted array, a merged array, etc., of the SD module 116 (FIGS. 1 & 2).For example, the variable values V21 thru V25 are sorted from a lowestof the values to a highest of the values. In this example, V21 is thelowest value and V25 is the highest value. Also, the times t1 thru t5are stored in a memory array 607 of the bias compensation module 196and/or of the event detection module 198. The times t1 thru t5 arereceived by the bias compensation module 196 and/or the event detectionmodule 198 from the SD module 116 for storage in the memory array 607.

The bias compensation module 196 determines whether the time t1 ofgeneration of the variable value V21 is the same as that of the time ofgeneration of the variable value V15. Upon determining that the time t1of generation of the variable value V21 is the same as that of thevariable value V15, the variable values V21 and V15 are used todetermine whether a bias exists in a plasma system. For example, upondetermining that the variable value V21 is outside a pre-determinedrange and the variable value V15 is outside a pre-determined range, itis determined that a bias exists. In this example, both the values V15and V21 are adjusted by the bias compensation module 196 for bias togenerate adjusted statistical values. As another example, upondetermining that the variable value V21 is within a pre-determined rangeand the variable value V15 is within a pre-determined range, it isdetermined that a bias does not exist within a plasma system. As yetanother example, upon determining that the variable value V21 is withina pre-determined range and the variable value V15 is outside apre-determined range, it is determined that a bias does not exist orthat a bias exists within a plasma system.

Similarly, the bias compensation module 196 determines whether the timet5 of generation of the variable value V25 is the same as that of thetime of generation of the variable value V11. Upon determining that thetime t5 of generation of the variable value V25 is the same as that ofthe variable value V11, the variable values V25 and V11 are used todetermine whether a bias exists in a plasma system.

Moreover, in some embodiments, the event detection module 198 determineswhether the time t1 of generation of the variable value V21 is the sameas that of the time of generation of the variable value V15. Upondetermining that the time t1 of generation of the variable value V21 isthe same as that of the variable value V15, the variable values V21 andV15 are used to determine whether a fault exists in a plasma system. Forexample, upon determining that the variable value V21 is outside apre-determined extent and the variable value V15 is outside apre-determined extent, it is determined that a fault exists. As anotherexample, upon determining that the variable value V21 is within apre-determined extent and the variable value V15 is within apre-determined extent, it is determined that a fault does not existwithin a plasma system. As yet another example, upon determining thatthe variable value V21 is within a pre-determined extent and thevariable value V15 is outside a pre-determined extent, it is determinedthat a fault does not exist or that a fault exists within a plasmasystem.

Similarly, the event detection module 198 determines whether the time t5of generation of the variable value V25 is the same as that of the timeof generation of the variable value V11. Upon determining that the timet5 of generation of the variable value V25 is the same as that of thevariable value V11, the variable values V25 and V11 are used todetermine whether a fault exists in a plasma system

FIG. 12 is a block diagram of an embodiment of an SD module 600 that isused to generate a moving variance 602. The SD module 600 includes anumber of adders A1, A2, A3, A4, and A5, a multiplier MU1, dividers D1and D2, and a square root calculator SQRT1. The SD module 600 is anexample of the SD module 116 (FIGS. 1 & 2).

The SD module 600 includes a current mean calculator, which calculates acurrent mean of values of a variable within a memory array, e.g., thememory array 502 (FIG. 6), or the memory array 504 (FIG. 7), or thememory array 506 (FIG. 7), or the merged memory array 508 (FIG. 7), orthe memory array 552 (FIG. 8), or the memory array 554 (FIG. 8), or themerged memory array 556 (FIG. 8), etc. Also, for a current data point xin a memory array, e.g., a value in a memory array, a value in a mergedmemory array, etc., from which the current mean is calculated, thecurrent mean is subtracted by the adder A1 from the current data pointto generate a delta value of a variance. The adder A2 adds the deltavalue with the current mean to generate a result and the result isdivided by a total number of data points n within a memory array fromwhich the current mean value is generated. A data point calculatorcalculates the total number of data points. The division of the resultby the total number of data points is performed by the divider D1 togenerate a next mean value of a variable. In some embodiments, the nextmean value is a statistical value.

The next mean value is subtracted by the adder A4 from the current datapoint x to generate an outcome and the outcome is multiplied by themultiplier MU1 with the delta value to generate a consequence. Theconsequence is added by the adder A5 to a current instantaneous mean M2to generate a next instantaneous mean M2. In some embodiments, the nextinstantaneous mean M2 is a statistical value.

The next instantaneous value M2 is divided by the divider D2 by a numberthat is one less than the total number of data points in a memory arrayto generate the moving variance 602. In various embodiments, the movingvariance 602 is a statistical value.

A square root of the moving variance 602 is calculated by the squareroot calculator SQRT1 to generate a moving standard deviation 604. Inseveral embodiments, the moving standard deviation 604 is a statisticalvalue.

It should be noted that for each different value in a memory array, thenext mean value, the next instantaneous mean, and the moving variance602 is different. The moving variance 602 changes with a change in valuewithin a memory array.

A pseudo code for generating the moving variance 602 is provided below:

def online_variance(data): n = 0 current mean = 0 M2 = 0 for x in data:  n = n + 1   delta = x − current mean   next mean = (current mean +delta)/n   next instantaneous mean M2 = current instantaneous mean M2 +delta*(x − next mean) moving variance = next instantaneous mean M2/(n− 1) return moving variance.

In the pseudo code, the total number of data points n, the current mean,and the current instantaneous mean are initialized to zero.

FIG. 13 is a flowchart of an embodiment of a method 700 for generating astatistical value. In the method 700, a variable is input from an RFsystem e.g., the x controller, or the y controller, or the z controller,or a combination thereof, etc., to a host controller, e.g., the hostcontroller 150 (FIG. 1), or the host controller 192 (FIG. 2), etc. Thevariable is propagated, in an operation 702, through the model 113(FIGS. 1-4). For example, a directional sum is calculated. In thisexample, the directional sum is a sum of a value of the variable andvalues of components of the model 113 through which the value of thevariable is propagated. In some embodiments, the operation 702 isperformed by the model value generator 115 (FIGS. 1-4).

The method 700 further includes an operation 704 of counting an outputof the model 113 for the variable. For example, a number of values thatare generated after propagating the variable through the model 113 iscounted. The values are generated at the output of the model 113 and arecalculated by the data amount calculator 112 (FIGS. 1 & 2). In someembodiments, the output of the model 113 that is counted includes adirectional sum.

In an operation 706 of the method 700, it is determined by the limitcrossover determination module 114 whether the count meets a countthreshold, which is a pre-stored number of values that is stored in astorage device of the limit crossover determination module 114. Thecounting of operation 704 continues when the count does not meet, e.g.,is less than, etc., the count threshold. On the other hand, when thecount meets, e.g., exceeds, is greater than or equal to, etc., the countthreshold, in an operation 708, a statistical value is generated fromthe output of the model 113 that is calculated by the model valuegenerator 115. For example, a statistical value is generated fromdirectional sums of values.

A statistical value is generated by the SD module 116 (FIGS. 1 & 2). Thestatistical value is sent, in an operation 710, by the sender 174 (FIGS.1 & 2) to the RF system to adjust the variable. For example, thestatistical value is sent to the x, y, and/or z controllers to generatean RF signal based on the statistical value.

It is noted that although the above-described embodiments are describedwith reference to parallel plate plasma chamber, in one embodiment, theabove-described embodiments apply to other types of plasma chambers,e.g., a plasma chamber including an inductively coupled plasma (ICP)reactor, a plasma chamber including an electron-cyclotron resonance(ECR) reactor, etc. For example, the x MHz, y MHz, and z MHz RFgenerators are coupled to an inductor within the ICP plasma chamber.

In some embodiments, a kilohertz (kHz) RF generator is used instead of aMHz RF generator. For example, instead of the x MHz RF generator, a 400kHz RF generator is used.

In various embodiments, a MHz RF generator has a frequency of operationin MHz and a kHz RF generator has a frequency of operation in kHz.

Some embodiments described herein are practiced with various computersystem configurations including hand-held devices, microprocessorsystems, microprocessor-based or programmable consumer electronics,minicomputers, mainframe computers and the like. Some of the embodimentsdescribed herein are practiced in distributed computing environmentswhere tasks are performed by remote processing devices that are linkedthrough a network.

With the above embodiments in mind, it should be understood that some ofthe embodiments described herein employ various computer-implementedoperations involving data stored in computer systems. These operationsare those requiring physical manipulation of physical quantities. Any ofthe operations described herein that form part of the embodiments areuseful machine operations. Some of the embodiments described herein alsorelate to a device or an apparatus for performing these operations. Insome embodiments, the apparatus is specially constructed for a specialpurpose computer. When defined as a special purpose computer, thecomputer performs other processing, program execution or routines thatare not part of the special purpose, while still being capable ofoperating for the special purpose. In various embodiments, theoperations are processed by a general purpose computer selectivelyactivated or configured by one or more computer programs stored in thecomputer memory, cache, or obtained over a network. When data isobtained over a network, the data is processed by other computers on thenetwork, e.g., a cloud of computing resources.

Some of the embodiments are fabricated as computer-readable code on anon-transitory computer-readable medium. The non-transitorycomputer-readable medium is any data storage device that can store data,which can be thereafter be read by a computer system. Examples of thenon-transitory computer-readable medium include hard drives, networkattached storage (NAS), ROM, RAM, compact disc-ROMs (CD-ROMs),CD-recordables (CD-Rs), CD-rewritables (CD-RWs), magnetic tapes andother optical and non-optical data storage devices. In some embodiments,the non-transitory computer-readable medium includes computer-readabletangible medium distributed over a network-coupled computer system sothat the computer-readable code is stored and executed in a distributedfashion.

Although the method operations were described in a specific order, itshould be understood that in some embodiments, other housekeepingoperations are performed in between operations, or operations areadjusted so that they occur at slightly different times, or aredistributed in a system which allows the occurrence of the processingoperations at various intervals associated with the processing, as longas the processing of the overlay operations are performed in the desiredway.

In some embodiments, one or more features from any embodiment arecombined with one or more features of any other embodiment withoutdeparting from the scope described in various embodiments described inthe present disclosure.

Although the foregoing embodiments have been described in some detailfor purposes of clarity of understanding, it will be apparent thatcertain changes and modifications can be practiced within the scope ofthe appended claims. Accordingly, the present embodiments are to beconsidered as illustrative and not restrictive, and the embodiments arenot to be limited to the details given herein, but may be modifiedwithin the scope and equivalents of the appended claims.

What is claimed is:
 1. A system comprising: a radio frequency (RF)generator configured to generate an RF signal; an impedance matchingcircuit connected to the RF generator via an RF cable for receiving theRF signal, wherein the impedance matching circuit is configured togenerate a modified signal from the RF signal; a plasma chamberincluding an electrode, wherein the electrode is connected to theimpedance matching circuit via an RF transmission line for receiving themodified signal; and a host controller coupled to the RF generator,wherein the host controller is configured to: receive a variable fromthe RF generator; propagate the variable through a model of at least oneof the RF cable, the impedance matching circuit, the RF transmissionline, and the electrode; count an output of the model for the variableto generate a count; determine whether the count meets a countthreshold; generate a statistical value of the variable at the output ofthe model upon determining that the count meets the count threshold; andsend the statistical value to the RF generator to adjust the variable.2. The system of claim 1, wherein the variable includes power, orfrequency, or a voltage magnitude, or a current magnitude, or a phasebetween a complex voltage and a complex current, or a complex current,or a complex voltage, or a combination thereof.
 3. The system of claim1, wherein the model is a computer-generated model, wherein to propagatethe variable through the model, the host controller is configured togenerate a directional sum of a value of the variable and of variablevalues associated with components of the model.
 4. The system of claim1, wherein the output of the model includes multiple values of thevariable.
 5. The system of claim 4, wherein the statistical valueincludes a moving interquartile range of the values, or an interquartilerange of the values, or a maximum of the values, or a minimum of thevalues, or a mean of the values, or a median of the values, or avariance of the values, or a standard deviation of the values, or amoving mean of the values, or a moving median of the values, or a movingvariance of the values, or a moving standard deviation of the values, ora mode of the values, or a moving mode of the values, or a combinationthereof.
 6. A system comprising: a radio frequency (RF) generatorconfigured to generate an RF signal; an impedance matching circuitconnected to the RF generator via an RF cable for receiving the RFsignal, wherein the impedance matching circuit is configured to generatea modified signal from the RF signal; a plasma chamber including anelectrode, wherein the electrode is connected to the impedance matchingcircuit via an RF transmission line for receiving the modified signal;and a host controller coupled to the RF generator, wherein the hostcontroller is configured to: receive data associated with a variablefrom the RF generator; generate values output from a computer-generatedmodel based on the received data, wherein the computer-generated modelis generated based on at least one of the RF cable, the impedancematching circuit, the RF transmission line, and the electrode; count anamount of the values output from the computer-generated model; determinewhether the amount exceeds a count threshold; generate a statisticalvalue from the values output from the computer-generated model inresponse to determining that the amount exceeds the count threshold;send the statistical value to the RF generator to adjust the RF signalgenerated by the RF generator.
 7. The system of claim 6, wherein thevariable includes power, or frequency, or a voltage magnitude, or acurrent magnitude, or a phase between a complex voltage and a complexcurrent, or a complex current, or a complex voltage, or a combinationthereof.
 8. The system of claim 6, wherein the impedance matchingcircuit matches an impedance of a source with that of a load, whereinthe source includes the RF generator and the RF cable, wherein the loadincludes the plasma chamber and the RF transmission line.
 9. The systemof claim 6, wherein the plasma chamber includes an upper electrode and achuck facing the lower electrode, wherein the chuck includes the lowerelectrode.
 10. The system of claim 6, wherein the variable includes acomplex voltage and current at a point on the RF cable between the RFgenerator and the impedance matching circuit.
 13. The system of claim 6,wherein the amount includes a number of the values, wherein thestatistical value includes a moving interquartile range of the values,or an interquartile range of the values, or a maximum of the values, ora minimum of the values, or a mean of the values, or a median of thevalues, or a variance of the values, or a standard deviation of thevalues, or a moving mean of the values, or a moving median of thevalues, or a moving variance of the values, or a moving standarddeviation of the values, or a mode of the values, or a moving mode ofthe values, or a combination thereof.
 14. The system of claim 6, whereinthe host controller is configured to decimate the data received aftergenerating the statistical value.
 15. A system comprising: a radiofrequency (RF) generator configured to generate an RF signal; animpedance matching circuit connected to the RF generator via an RF cablefor receiving the RF signal, wherein the impedance matching circuit isconfigured to generate a modified signal from the RF signal; a plasmachamber including an electrode, wherein the electrode is connected tothe impedance matching circuit via an RF transmission line for receivingthe modified signal; and a host controller coupled to the RF generator,wherein the host controller is configured to: receive data associatedwith a variable from the RF generator; generate values at an output of acomputer-generated model based on the received data, wherein thecomputer-generated model is generated based on at least one of the RFcable, the impedance matching circuit, the RF transmission line, and theelectrode; count an amount of the values output from of thecomputer-generated model; determine whether the amount exceeds athreshold; generate a statistical value from the values output from thecomputer-generated model in response to determining that the amountexceeds the threshold; determine whether the statistical value isoutside a pre-determined range; adjust the statistical value to bewithin the pre-determined range in response to determining that thestatistical value is outside the pre-determined range; and send theadjusted statistical value to the RF generator to control the RFgenerator to adjust the RF signal produced by the RF generator.
 16. Thesystem of claim 15, wherein the variable includes power, or frequency,or a voltage magnitude, or a current magnitude, or a phase between acomplex voltage and a complex current, or a complex current, or acomplex voltage, or a combination thereof.
 17. The system of claim 15,wherein the impedance matching circuit matches an impedance of a sourcewith that of a load, wherein the source includes the RF generator andthe RF cable, wherein the load includes the plasma chamber and the RFtransmission line.
 18. The system of claim 15, wherein the plasmachamber includes a chuck and an upper electrode facing the chuck,wherein the chuck includes the lower electrode.
 19. The system of claim15, wherein the variable includes a complex voltage and current at apoint on the RF cable.
 20. A system comprising: a radio frequency (RF)generator configured to generate an RF signal; an impedance matchingcircuit connected to the RF generator via an RF cable for receiving theRF signal, wherein the impedance matching circuit is configured togenerate a modified signal from the RF signal; a plasma chamberincluding an electrode, wherein the electrode is connected to theimpedance matching circuit via an RF transmission line for receiving themodified signal; and a host controller coupled to the RF generator,wherein the host controller is configured to: receive data associatedwith a variable from the RF generator; generate values at an output of acomputer-generated model based on the received data, wherein thecomputer-generated model is generated based on at least one of the RFcable, the impedance matching circuit, the RF transmission line, and theelectrode; count an amount of the values output from thecomputer-generated model; determine whether the amount exceeds a countthreshold; generate a statistical value from the values output from ofthe computer-generated model in response to determining that the amountexceeds the count threshold; determine whether the statistical value isoutside a pre-determined extent; generate an indication of a fault inresponse to determining that the statistical value is outside thepre-determined extent; and send the fault indication to the RFgenerator.
 21. The system of claim 20, wherein the host controller isconfigured to: determine whether the statistical value is within apre-determined range; adjust the statistical value to be within thepre-determined range in response to determining that the statisticalvalue is outside the pre-determined range; and send the adjustedstatistical value to the RF generator to control the RF generator togenerate an adjusted RF signal to provide to the plasma chamber via theimpedance matching circuit.
 22. The system of claim 20, wherein thevariable includes power, or frequency, or real portion of loadimpedance, and or imaginary portion of the load impedance, or a voltagemagnitude, or a current magnitude, or a phase between a complex voltageand a complex current, or wafer bias, or ion energy, or plasmapotential, or a complex current, or a complex voltage, or loadimpedance, or a combination thereof.
 23. The system of claim 20, whereinthe variable includes a complex voltage and current at a point on the RFcable.